Poly-wire-coupled Single Crystal Silicon Harpss Micromechanical Filters Using Oxide Islands
Year: 2004
Type: conference-paper
Abstract: This paper reports on the implementation of single crystal silicon micromechanical filters coupled through a thin polysilicon wire using a SOI-based HARPSS process.The formation of suspended thin poly wires, which provide weak mechanical coupling between high quality factor thick microresonators, are enabled by the use of thick sacrificial oxide islands created between adjacent single crystal silicon resonators.The oxide islands are also used beneath the input and output pads of the filters to reduce the parasitic capacitances to substrate.Mechanical coupling of microresonators using thin-film wires provides superior design flexibility since the material and thickness of the coupling element can be chosen independent of those of the resonators.Measurement results obtained from 800kHz two-pole HARPSS micromechanical filters with thin poly wire are presented.
Authors: R. Abdolvand, G.K. Ho, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W2115723999