Influence of Sputtering Power of Te and Annealing on Sb-Te Thin Films Fabricated by RF and DC Co-Sputtering
Year: 2011
Type: article
Source: Advanced materials research
Authors: Tian Bao Chen, Ping Fan, Zhuang Hao Zheng, Dong Ping Zhang, Xing Min Cai, Guang Xing Liang, Jing Rong Chi
Institution: Shenzhen University
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2115950326