Work

Programmable transformation of vertically aligned carbon nanotubes into 3D microstructures

Year: 2011

Type: conference-paper

Abstract: Capillary forming of carbon nanotubes (CNTs) enables the fabrication of unique 3D microstructures over large areas. In this paper we focus on the simulation as well as on the integration of these structures in MEMS devices. We developed finite element models (FEM) that enables qualitative prediction of shape transformations caused by capillary forming; and show how capillary formed CNT structured can be integrated with conventional lithographic processing for patterning of polymers and metals in concert with CNTs.

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2011.5969791

Authors: M. De Volder, S. Tawfick, S.J. Park, D. Copic, A.J. Hart

Institutions: University of Michigan, IMEC, KU Leuven

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: National Science Foundation, Fonds Wetenschappelijk Onderzoek, Vlaamse regering, Division of Civil, Mechanical and Manufacturing Innovation

Award: Fabrication of Freeform Hierarchical Micro/Nanostructures by Control of Capillary Interactions with Aligned Carbon Nanotubes