Work

CMOS resonant beam gas sensing system with on-chip self excitation

Year: 2002

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2001.906600

Authors: D. Lange, C. Hagleitner, O. Brand, H. Baltes

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2117003198

FWCI: 4.266

Cites: 14

Cited by: 34

Related to: 10