On the Formation of Ultrathin Simox Structures by Low Energy Implantation
Year: 1992
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-284-567
Authors: F. Namavar, B. Buchanan, N. M. Kalkhoran
Institution: Spire Corporation (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2117090960