Work

Fast extraction of defect size distribution using a single layer short flow NEST structure

Year: 2001

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/66.964320

Authors: C. Hess, D. Stashower, B.E. Stine, L.H. Weiland, G. Verma, K. Miyamoto, K. Inoue

Institutions: PDF Solutions (United States), KLA (United States), Toshiba (Japan)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2117219865

FWCI: 1.673

Cites: 5

Cited by: 18

Related to: 10