Work

Sub-micro-gravity capacitive SOI microaccelerometers

Year: 2005

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2005.1496467

Authors: B.V. Amini, R. Abdolvand, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Aeronautics and Space Administration

OpenAlex ID: W2117606422

FWCI: 4.949

Cites: 9

Cited by: 23

Related to: 10