Work

Design optimization and implementation of a microgravity capacitive HARPSS accelerometer

Year: 2006

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2005.854134

Authors: P. Monajemi, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2118982144

FWCI: 3.706

Cites: 17

Cited by: 50

Related to: 10