Work

Interconnect limits on gigascale integration (GSI) in the 21st century

Year: 2001

Type: article

Source: Proceedings of the IEEE

DOI: 10.1109/5.915376

Authors: J.A. Davis, R. Venkatesan, A. Kaloyeros, M. Beylansky, S.J. Souri, K. Banerjee, K.C. Saraswat, A. Rahman, R. Reif, J.D. Meindl

Institutions: Georgia Institute of Technology, State University of New York, University at Albany, State University of New York, Stanford University, Massachusetts Institute of Technology

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2120149280

FWCI: 20.12

Cites: 47

Cited by: 511

Related to: 10