Work

A new numerical formulation for thermal oxidation

Year: 2002

Type: conference-paper

Source: International Conference on Simulation of Semiconductor Processes and Devices

DOI: 10.1109/sispad.1997.621381

Authors: V.S. Rao, T.J.R. Hughes, E. Kan, R.W. Dutton

Institution: Stanford University

Language: English

Topic: Advanced Numerical Methods in Computational Mathematics

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2120383192

FWCI: 0.581

Cites: 9

Cited by: 2

Related to: 10