An integrated BioMEMS fabrication technology
Year: 2002
Type: conference-paper
Authors: A. Gadre, M. Kastantin, Sheng Li, R. Ghodssi
Institution: University of Maryland, College Park
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2120660233
