Work

'Smart integrated circuit processing

Year: 1989

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/66.44619

Authors: C.-Y. Fu, N.H. Chang, K.-K. Lin

Institutions: Lawrence Livermore National Laboratory, University of California, Berkeley

Language: English

Topic: Advanced Computational Techniques and Applications

Subfield: Artificial Intelligence

Field: Computer Science

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2121197024

FWCI: 1.903

Cites: 9

Cited by: 9

Related to: 10