Soft lithographic fabrication of microresonators
Year: 2007
Type: conference-paper
DOI: 10.1117/12.754326
Authors: Andrea M. Armani, Kerry J. Vahala
Institution: California Institute of Technology
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2121315813