Work

Piezoelectric microphone with on-chip CMOS circuits

Year: 1993

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/84.260255

Authors: R.P. Ried, Eun Sok Kim, D.M. Hong, R.S. Muller

Institutions: University of California, Berkeley, University of Hawaiʻi at Mānoa

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: U.S. Department of Transportation, University of California Berkeley, British Society for Antimicrobial Chemotherapy, Lawrence Livermore National Laboratory

OpenAlex ID: W2122696840

FWCI: 2.467

Cites: 22

Cited by: 132

Related to: 10