Work

Compensation, tuning, and trimming of MEMS resonators

Year: 2012

Type: conference-paper

Source: Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)

DOI: 10.1109/fcs.2012.6243717

Authors: Farrokh Ayazi, Roozbeh Tabrizian, Logan Sorenson

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2123419249

FWCI: 3.437

Cites: 65

Cited by: 24

Related to: 10