Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
Year: 1998
Type: article
DOI: 10.1109/84.679393
Institution: University of California, Berkeley
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2123498192