Etch Selectivity of Novel Epitaxial Layers for Bulk Micromachining
Year: 1998
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-546-69
Institutions: Draper Laboratory, Massachusetts Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2123607234