Work

Towards Inertial Grade Vibratory Microgyros: a High-q In-plane Silicon-on-insulator Tuning Fork Device

Year: 2004

Type: conference-paper

Abstract: This paper reports on the design and implementation of an in-plane solid-mass single-crystal silicon tuning fork gyro that has potential to achieve inertial-grade performance.A novel design is devised to achieve high Q in the drive and sense resonant modes (Q drive =84,000 and Q sense =64,000) with effective decoupling.The gyroscope was fabricated on 40µm SOI using a two-mask process.The drive and sense resonant modes were matched electronically to within 0.07% of each other and the measured rate results show a sensitivity of 1.25mV/º/s in a bandwidth of 12Hz.

Source: Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)

DOI: 10.31438/trf.hh2004.100

Authors: M. Zaman, A. Sharma, B. Amini, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2123852618

FWCI: 0.826

Cites: 8

Cited by: 12

Related to: 10