Work

Single-mask reduced-gap capacitive micromachined devices

Year: 2005

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2005.1453889

Authors: R. Abdolvand, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2124413043

FWCI: 3.849

Cites: 12

Cited by: 9

Related to: 10