Enhancement of resist plasma erosion rates by electron-beam hardening
Year: 1982
Type: article
Source: Electronics Letters
DOI: 10.1049/el:19820710
Authors: R.A. Morgan, C.J. Pollard
Institutions: BT Research, BT Group (United Kingdom)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2124446270