Work

Analytical Modeling and Numerical Simulation of Capacitive Silicon Bulk Acoustic Resonators

Year: 2009

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2009.4805538

Authors: G. Casinovi, X. Gao, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2124511537

FWCI: 2.779

Cites: 5

Cited by: 6

Related to: 10