Work

Development of an end-point detector for parylene deposition process

Year: 2003

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2002.807473

Authors: W. Sutomo, Xuefeng Wang, D. Bullen, S.K. Braden, Chang Liu

Institutions: University of Illinois Urbana-Champaign, Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2124512657

FWCI: 0.67

Cites: 6

Cited by: 10

Related to: 10