Work

Silicon-micromachined scanning confocal optical microscope

Year: 1998

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/84.661382

Authors: D.L. Dickensheets, G.S. Kino

Institution: Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2124879373

FWCI: 9.259

Cites: 17

Cited by: 187

Related to: 10