Work

Parylene background fluorescence study for biomems applications

Year: 2009

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2009.5285534

Authors: Bo Lu, Siyang Zheng, Yu-Chong Tai

Institutions: California Institute of Technology, Pennsylvania State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: California Institute of Technology, National Institutes of Health

OpenAlex ID: W2125016928

FWCI: 0.479

Cites: 8

Cited by: 5

Related to: 10