Industrial fabrication method for arbitrarily shaped silicon N-well micromechanical structures
Year: 2002
Type: conference-paper
Authors: T. Muller, T. Feichtinger, G. Breitenbach, M. Brandl, O. Brand, H. Baltes
Institutions: ETH Zurich, University of Koblenz and Landau
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2125326102