Work

Low loss etchless silicon photonic waveguides

Year: 2009

Type: article

Abstract: We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 microm. The waveguide geometry enables low bending loss of approximately 0.007 dB/bend for a 90 degrees bend with a 50 microm bending radius.

Source: Optics Express

DOI: 10.1364/oe.17.004752

Authors: Jaime Cardenas, Carl B. Poitras, Jacob T. Robinson, Kyle Preston, Long Chen, Michal Lipson

Institution: Cornell University

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funders: National Science Foundation, Defense Advanced Research Projects Agency