Work

Directly patternable thick film hybrid glass materials for micro-opto-mechanical structures

Year: 2002

Type: conference-paper

Source: IEEE/LEOS International Conference on Optical MEMS

DOI: 10.1109/omems.2000.879651

Authors: J.T. Rantala, S. Juuso, R. Levy, L. Kivimaki, M.R. Descour

Institutions: Infotech Oulu, VTT Technical Research Centre of Finland, University of Arizona

Language: English

Topic: Glass properties and applications

Subfield: Ceramics and Composites

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2126037421

FWCI:

Cites: 3

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Related to: 10