TiNi-based thin films in MEMS applications: a review
Year: 2004
Type: article
Source: Sensors and Actuators A Physical
Authors: Yongqing Fu, Hejun Du, Weimin Huang, Sam Zhang, Min Hu
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2126170208
