Work

Electrostatically tunable piezoelectric-on- silicon micromechanical resonator for real-time clock

Year: 2012

Type: article

Source: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

DOI: 10.1109/tuffc.2012.2204

Authors: D. E. Serrano, R. Tabrizian, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2126384823

FWCI: 2.004

Cites: 20

Cited by: 34

Related to: 10