Work

CMOS-compatible back-end process for in-plane actuating ferromagnetic MEMS

Year: 2009

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2009.5285516

Authors: Michael Glickman, Peter Tseng, Jere Harrison, Ira B. Goldberg, Peter Johnson, Peter Smeys, Trevor Niblock, Jack W. Judy

Institutions: University of California, Los Angeles, Analatom (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2126432007

FWCI: 1.437

Cites: 9

Cited by: 6

Related to: 10