Work

Low-Impedance VHF and UHF Capacitive Silicon Bulk Acoustic Wave Resonators—Part I: Concept and Fabrication

Year: 2007

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2007.901403

Authors: S. Pourkamali, G.K. Ho, F. Ayazi

Institutions: University of Denver, Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2126934971

FWCI: 6.454

Cites: 27

Cited by: 101

Related to: 10