Work

Addressing the needs of complex MEMS design

Year: 2003

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2002.984240

Authors: J.V. Clark, D. Bindel, W. Kao, E. Zhu, A. Kuo, N. Zhou, J. Nie, J. Demmel, Z. Bai, S. Govindjee, K.S.J. Pister, M. Gu, A. Agogino

Institutions: University of California, Berkeley, University of Michigan, University of California, Davis

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2127069820

FWCI: 9.511

Cites: 11

Cited by: 39

Related to: 10