Work

Indium Phosphide Optical MEMS for Chemical and Biological Sensing

Year: 2006

Type: conference-paper

DOI: 10.1109/lssa.2006.250369

Authors: Nathan Siwak, Jonathan McGee, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2127221635

FWCI:

Cites: 7

Cited by: 4

Related to: 10