Work

Effect of implantation energy on surface pitting of SIMOX

Year: 2002

Type: conference-paper

Source: IEEE International SOI Conference (SOI)

DOI: 10.1109/soi.1991.162880

Authors: F. Namavar, E. Cortesi, J.M. Manke, N.M. Kalkhoran, B.L. Buchanan, R.F. Pinizzotto, H. Yang

Institutions: Spire Corporation (United States), University of North Texas

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2127250417

FWCI:

Cites: 2

Cited by: 2

Related to: 10