Silicon Carbide as a Material for Biomedical Microsystems
Year: 2009
Type: article
Abstract: - Silicon Carbide (SiC) is emerging as an enabling material for biomedical microsystems due to its unique combination of electrical, mechanical and chemical properties combined with its compatibility with Si micromachining techniques. This paper presents an overview of the latest advancements in this area including on-going research to develop SiC for biosensing, bio-microdevice packaging, biofiltering, biomedical imaging and other related biomedical applications. I.
Author: Christian A. Zorman
Institution: Case Western Reserve University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2127528194