Work

Characterization of Mechanical Properties of Silicon Nitride Thin Films for Space Applications

Year: 2003

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-782-a5.21

Authors: Wen-Hsien Chuang, Thomas Luger, Rainer K. Fettig, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Goddard Space Flight Center

OpenAlex ID: W2127730255

FWCI: 0.335

Cites:

Cited by: 7

Related to: 10