Work

History of some early developments in ion-implantation technology leading to silicon transistor manufacturing

Year: 1998

Type: article

Source: Proceedings of the IEEE

DOI: 10.1109/5.658764

Author: R.B. Fair

Institution: Duke University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2127809467

FWCI: 0.976

Cites: 94

Cited by: 38

Related to: 10