Work

Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps

Year: 2004

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/mems.2004.1290709

Authors: S. Pourkamali, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2128019221

FWCI: 5.375

Cites: 5

Cited by: 17

Related to: 10