Work

Microfabrication of cantilever styli for the atomic force microscope

Year: 1990

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.576520

Authors: T. R. Albrecht, S. Akamine, T. E. Carver, C. F. Quate

Institution: Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2128193161

FWCI: 30.41

Cites:

Cited by: 763

Related to: 10