Work

Precise release and insulation technology for vertical hall sensors and trench-defined MEMS

Year: 2006

Type: conference-paper

Source: Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...

DOI: 10.1109/icsens.2004.1426457

Authors: R. Sunier, P. Monajemi, F. Ayazi, T. Vancura, H. Baltes, O. Brand

Institutions: ETH Zurich, Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2128519932

FWCI: 0.53

Cites: 3

Cited by: 4

Related to: 10