Work

Thermal Chemical Vapor Deposition of Silicon Carbide Films as Protective Coatings for Microfluidic Structures

Year: 2002

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-742-k2.4

Authors: Spyros Gallis, Ulrike Futschik, James Castracane, Alain E. Kaloyeros, Harry Efstathiadis, Walter Sherwood, Susan Hayes, Costas G. Fountzoulas

Institutions: University at Albany, State University of New York, Starfire Systems (United States), DEVCOM Army Research Laboratory

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2129909489

FWCI:

Cites: 4

Cited by: 4

Related to: 10