Fabrication of uniform nanogrooves on 6H-SiC by femtosecond laser ablation
Year: 2010
Type: article
Source: Applied Physics A
Authors: Sung Hoon Kim, Ik-Bu Sohn, Sungho Jeong
Institution: Gwangju Institute of Science and Technology
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Ministry of Knowledge Economy
OpenAlex ID: W2130069442
