Interfacial Microstructure and Carrier Conduction Process in Pt/Ti Ohmic Contact to P-In0.53Ga0.47As Formed by Rapid Thermal Processing
Year: 1990
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-181-389
Authors: S.N.G. Chu, A. Katz, T. Boone, P.M. Thomas, V.G. Riggs, W.C. Dautremont-Smith, W.D. Johnson
Institution: AT&T (United States)
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2130180337
