Work

Combined capacitive and piezoelectric transduction for high performance silicon microresonators

Year: 2011

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2011.5734388

Authors: A.K. Samarao, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Research Institute, Georgia Institute of Technology

OpenAlex ID: W2130198280

FWCI: 2.604

Cites: 10

Cited by: 18

Related to: 10