Work

Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications

Year: 2010

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2010.2052093

Authors: Luke Armitage Beardslee, Assim M. Addous, Stephen Heinrich, Fabien Josse, Isabelle Dufour, Oliver Brand

Institutions: Georgia Institute of Technology, Marquette University, Université de Bordeaux, Laboratoire de l'Intégration du Matériau au Système, Université Bordeaux-I

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Georgia Institute of Technology, Agence Nationale de la Recherche

Award: Détermination des propriétés rhéologiques d'un fluide à l'aide de vibration de microlevier

OpenAlex ID: W2131997523

FWCI: 8.573

Cites: 18

Cited by: 105

Related to: 10