Work

Electrical characterization of ALD-coated silicon dioxide micro-hemispherical shell resonators

Year: 2014

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2014.6765715

Authors: Peng Shao, Vahid Tavassoli, Chang-Shun Liu, Logan Sorenson, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Northrop Grumman, Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2132309683

FWCI: 4.864

Cites: 9

Cited by: 20

Related to: 10