Multi-axis AlN-on-Silicon vibration energy harvester with integrated frequency-upconverting transducers
Year: 2012
Type: conference-paper
Authors: J. L. Fu, Y. Nakano, L. D. Sorenson, F. Ayazi
Institutions: Georgia Institute of Technology, Tohoku University
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2132638676
