Work

Electrical Characterization of Benzocyclobutene Polymers for Electric Micromachines

Year: 2004

Type: article

Source: IEEE Transactions on Device and Materials Reliability

DOI: 10.1109/tdmr.2004.830289

Authors: A. Modafe, N. Ghalichechian, B. Kleber, R. Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Dielectric materials and actuators

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2133832608

FWCI: 2.27

Cites: 44

Cited by: 37

Related to: 10