Work

Tunable silicon bulk acoustic resonators with multi-face AlN transduction

Year: 2011

Type: conference-paper

Source: Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)

DOI: 10.1109/fcs.2011.5977886

Authors: Roozbeh Tabrizian, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Research Institute, Georgia Institute of Technology

OpenAlex ID: W2134088494

FWCI: 1.352

Cites: 11

Cited by: 7

Related to: 10