Work

Thin film deposition and microelectronic and optoelectronic device fabrication and characterization in monocrystalline alpha and beta silicon carbide

Year: 1991

Type: article

Source: Proceedings of the IEEE

DOI: 10.1109/5.90132

Authors: R.F. Davis, G. Kelner, M. Shur, J.W. Palmour, J.A. Edmond

Institutions: North Carolina State University, United States Naval Research Laboratory, University of Virginia, Wolfspeed, Inc. (United States)

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2134158954

FWCI: 25.99

Cites: 123

Cited by: 405

Related to: 9